• Pulse Energy: Maximum single pulse energy 158.3mJ (@28kV)

Repair Case Study: CompexPro102F Excimer Laser Full Refurbishment & Performance Enhancement

Laser System: Coherent CompexPro102F Excimer Laser
Service Date: June 2025
Objective: Complete system overhaul to restore and enhance performance, exceeding 300mJ single pulse energy at 248nm and improving overall operational lifespan.

Background & Challenge:
A client's CompexPro102F excimer laser system required comprehensive maintenance and repair. The primary goal was to restore its operational performance, specifically targeting a single pulse energy greater than 300mJ at its operational wavelength of 248nm, and to ensure an extended lifespan for the entire system.

Our Comprehensive Service & Repair Process:
Our team undertook a meticulous and systematic approach to address all critical components of the CompexPro102F laser:

1. Discharge Unit Refurbishment: Complete refurbishment of discharge electrodes and pre-ionization units to ensure optimal and stable plasma generation.

2. Laser Cavity Servicing: The laser cavity was carefully opened, inspected for any wear or contamination, thoroughly cleaned, and reconditioned.

3. Gas Circulation System Overhaul: The gas circulation system, including the fan and ducting, was refurbished to ensure efficient and clean gas flow, critical for stable laser operation and gas lifetime.

4. Thyratron Trigger Module Repair: The thyratron trigger module was diagnosed, repaired, and rigorously tested to guarantee precise and reliable switching.

5. Control System Diagnostics & Repair: Any anomalies within the control system were identified and rectified to ensure seamless and safe operation.

6. System-Wide Gas Tightness: A comprehensive leak detection procedure was performed across the entire gas system, followed by necessary repairs to ensure vacuum integrity and gas purity.

7. High-Voltage Power Supply Maintenance: The high-voltage power supply underwent thorough inspection and maintenance to ensure stable and reliable power delivery.

8. Full System Testing & Performance Validation: Post-repair, the entire laser system was assembled and subjected to extensive testing to confirm all performance metrics were met or exceeded.

Results & Achievements:
The refurbishment was highly successful, with the CompexPro102F not only meeting but significantly exceeding the contractual performance targets.

• Wavelength Confirmation:

  • Achieved: 248nm (Spectral peak precisely measured at 248.3nm)
    

• Pulse Energy:

  • Target: >300mJ @ 248nm

  • Achieved Maximum: 469mJ (at 28kV / 10Hz)

  • The laser demonstrated excellent energy stability across a range of operating voltages and repetition rates.
    

Test Video

• Gas Lifetime:

  • The laser demonstrated robust gas lifetime, maintaining significant energy output over an extended pulse count. At 24kV/10Hz, the energy started at 375.0mJ and was still at 317.0mJ after 162,000 pulses.
    

• Beam Profile (Spot Size):

  • Measured: Approximately 24mm x 8mm

• Pulse Width:

  • Measured (FWHM): Approximately 30ns

Conclusion:
The comprehensive repair and maintenance program for the CompexPro102F excimer laser resulted in a full restoration of its operational capabilities. The system now significantly exceeds its original performance specifications, particularly in maximum pulse energy, and demonstrates excellent stability and gas lifetime. This successful refurbishment not only meets the client's immediate operational needs but also ensures an extended service life for their valuable laser equipment.

Does your excimer laser need expert attention? Contact us today to discuss your repair and maintenance needs!

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Frequently Asked Questions

Q1: How can I tell if my excimer laser needs repair?
A1: If the energy output of your laser decreases and no longer delivers optimal performance, it may need repairs. You can send us pictures of the relevant parts, and our engineers will conduct a preliminary assessment.

Q2: What information and preparations are needed before sending the laser parts for repair?
A2: We need your contact information, as well as the dimensions and weight of the equipment to calculate shipping costs. Make sure to securely package the device and clearly mark it "For Repair Only" to avoid customs duties.

Q3: What are the repair costs? Are there any additional fees?
A3: Repair costs are based on the complexity of the work and the cost of replacing parts. Additional costs may arise if other issues, such as faults with the internal black device, are discovered during the repair. Specific costs will be determined after inspection.

Q4: How are transportation and return arranged after repair?
A4: After repairs are completed, we will arrange transportation based on the return address you provide. Please confirm both the sending and return addresses as they will affect the shipping quote.

Q5: Is there a warranty for the repair service?
A5: We provide a warranty period for all our repair services to ensure that the repaired equipment meets performance standards.

Q6: How can I track the progress of the repair?
A6: You can keep up with the repair progress via our contact methods, such as WeChat and email. We will also proactively update you on significant repair statuses.

Q7: How do you handle repair needs for international customers?
A7: For international clients, we offer complete logistical support and customs advice to ensure your equipment safely reaches our repair center.

Q8: How is communication handled if additional repair needs arise?
A8: Should additional issues be discovered during the repair process, we will communicate with you in a timely manner and provide a detailed repair plan and budget to ensure you have sufficient information to make decisions.

Further reading:

• fiber laser source repair service