What is an Excimer Laser?
An excimer laser is a high-precision laser device that uses a mixture of rare gas halides as the gain medium to produce ultraviolet light with extremely short wavelengths. Known for its high energy output and precise control, this type of laser is extensively used in precision material processing and medical applications.
Applications of Excimer Lasers
Excimer lasers are utilized widely in several industries due to their unique properties:
- Semiconductor Manufacturing: Used in lithography processes for miniaturization.
- Ophthalmic Surgery: Such as LASIK, to improve patients' vision.
- Material Processing: Used for drilling, cutting, or marking various materials.
- Scientific Research: Employed in precise measurements and experiments in physics and chemistry.
Reasons to Choose Excimer Laser Repair
- Cost-Effectiveness: Excimer lasers are expensive to purchase and operate. Repairing rather than replacing these devices can significantly reduce costs.
- Extended Lifespan: Regular professional maintenance not only restores laser performance but also significantly extends its operational life.
- Downtime Prevention: Timely repairs prevent lengthy downtimes caused by equipment failures, ensuring continuous production and research activities.
Why Choose Our Repair Services?
- Industry Leadership: Sky Fire Laser is among the few technical teams in China capable of professionally repairing excimer lasers.
- Advanced Facilities: Our repair lab is equipped with industry-leading repair and monitoring equipment.
- Experienced Technicians: Our engineering team possesses deep knowledge and extensive experience in laser technology repair.
- Customized Services: We offer personalized repair plans tailored to the specific needs and budgets of our clients.
Repair Case Study: MIDI V5.2 Technolas Excimer Laser
Background
In April 2024, we undertook a challenging project to restore the performance of a MIDI V5.2 Technolas excimer laser. This device was unable to meet factory specifications due to multiple performance issues, affecting the client's production.
I. Maintenance Details
- Laser Cavity: Opening, inspecting, thoroughly cleaning, and maintaining the laser cavity.
- Discharge Electrodes: Sputtering and corrosion cleaning of discharge electrodes and pre-ionization components.
- Gas Circulation Air Path: Refurbishment of the gas circulation air path.
- Power Supply: Repair of the high-voltage dust removal power supply.
- Airtightness Testing: Comprehensive airtightness testing and repair.
- Machine Testing: Complete machine testing, restoring performance benchmarks.
II. Contractual Performance Benchmarks
- Performance Restoration: Restoration of overall laser performance, with the laser's single pulse maximum energy >100mJ (193nm).
- Extended Lifespan: Ensuring an extended operational lifespan of the device.
III. Maintenance Test Results
- Wavelength: 193nm
- Pulse Energy: Maximum single pulse energy 158.3mJ (@28kV)
|
Energy Storage Voltage (kV) |
Energy (mJ) |
||||||||
|
1Hz |
10Hz |
20Hz |
|||||||
|
Ave |
Std |
Relative Std % |
Ave |
Std |
Relative Std % |
Ave |
Std |
Relative Std % |
|
|
25.0 |
139.2 |
0.89 |
0.64 |
135.1 |
1.34 |
0.99 |
129.7 |
1.75 |
1.35 |
|
26.0 |
148.7 |
1.09 |
0.73 |
142.2 |
1.19 |
0.84 |
136.9 |
1.46 |
1.07 |
|
27.0 |
153.1 |
1.11 |
0.73 |
148.2 |
1.13 |
0.76 |
143.4 |
1.44 |
1.00 |
|
28.0 |
158.3 |
1.43 |
0.90 |
153.8 |
1.52 |
0.99 |
148.8 |
1.37 |
0.92 |
- Operational Gas Lifetime at 25kV/20Hz:
|
25kV/20Hz |
Energy mJ |
|
|
|
10Hz |
20Hz |
|
0 |
135.1 |
129.7 |
|
36 |
128.9 |
123.8 |
|
72 |
121.8 |
119.2 |
|
108 |
114.7 |
113.5 |
|
Idle for15 hrs |
99.4 |
95.0 |
|
180 |
93.8 |
91.2 |
|
216 |
87.7 |
91.2 |
|
252 |
95.9 |
93.8 |
|
288 |
92.2 |
89.8 |
|
Idle for 42 hrs |
85.5 |
80.5 |
|
324 |
79.4 |
76.1 |
|
360 |
72.9 |
70.1 |
|
396 |
67.6 |
65.9 |
|
432 |
62.5 |
61.5 |
|
468 |
60.1 |
58.4 |
|
504 |
55.1 |
52.9 |
|
540 |
50.1 |
49.2 |
- Comparison before and after lens replacement：
- Beam Profile:15mm*5mm
Presentation on photographic paper
Pulse Width: FWHM ≈ 16ns
IV. Test Site Photos
- Pulse Width Testing:
- Spectrum Testing:
Video
Frequently Asked Questions
Q1: How can I tell if my excimer laser needs repair?
A1: If the energy output of your laser decreases and no longer delivers optimal performance, it may need repairs. You can send us pictures of the relevant parts, and our engineers will conduct a preliminary assessment.
Q2: What information and preparations are needed before sending the laser parts for repair?
A2: We need your contact information, as well as the dimensions and weight of the equipment to calculate shipping costs. Make sure to securely package the device and clearly mark it "For Repair Only" to avoid customs duties.
Q3: What are the repair costs? Are there any additional fees?
A3: Repair costs are based on the complexity of the work and the cost of replacing parts. Additional costs may arise if other issues, such as faults with the internal black device, are discovered during the repair. Specific costs will be determined after inspection.
Q4: How are transportation and return arranged after repair?
A4: After repairs are completed, we will arrange transportation based on the return address you provide. Please confirm both the sending and return addresses as they will affect the shipping quote.
Q5: Is there a warranty for the repair service?
A5: We provide a warranty period for all our repair services to ensure that the repaired equipment meets performance standards.
Q6: How can I track the progress of the repair?
A6: You can keep up with the repair progress via our contact methods, such as WeChat and email. We will also proactively update you on significant repair statuses.
Q7: How do you handle repair needs for international customers?
A7: For international clients, we offer complete logistical support and customs advice to ensure your equipment safely reaches our repair center.
Q8: How is communication handled if additional repair needs arise?
A8: Should additional issues be discovered during the repair process, we will communicate with you in a timely manner and provide a detailed repair plan and budget to ensure you have sufficient information to make decisions.
